| Prof.
Ahmed A. Busnaina, Ph.D. is the William Lincoln Smith Chair Professor
and Director of NSF Nanoscale Science and Engineering Center for High-rate
Nanomanufacturing and the NSF Center for Microcontamination Control at
Northeastern University, Boston, MA.
Dr. Busnaina is internationally recognized for his work on nano and micro
scale defects mitigation and removal in semiconductor fabrication. He
also involved in the fabrication of nanoscale wires, structures and interconnects.
He specializes in directed assembly of nanoelements (such as nanotubes
and nanoparticles) and in the fabrication of micro and nanoscale structures.
Research support exceeds 26 million dollars. He served as a consultant
on micro contamination and particle adhesion issues to the semiconductor
industry. He authored more than 450 papers in journals, proceedings and
conferences. He organized more than 90 conferences, workshops, symposia
and programs for many professional societies, chaired and organized more
than 90 sessions and panels. He also serves on many advisory boards including
Samsung Electronics; Chemical Industry Nanomaterials Roadmap, International
Technology Roadmap for Semiconductors, Journal of Particulate Science
and Technology, Journal of Environmental Sciences, Semiconductor International,
Journal of Advanced Applications in Contamination Control. He is a fellow
of the American Society of Mechanical Engineers, and the Adhesion Society,
a Fulbright Senior Scholar and listed in Who's Who in the World, in America,
in science and engineering, etc.). He was awarded the 2006 Nanotech Briefs
National Nano50 Award, Innovator category, the 2006 Outstanding Faculty,
SØren Buus Outstanding Research Award, Northeastern University
2006, the 2005 Aspiration Award, Northeastern University.
Dr. Busnaina received his MS and Ph.D. in Mechanical Engineering from
Oklahoma State University. He was a Professor, Department of Mechanical
and Aeronautical Engineering, Clarkson University for 17 years. He was
the director of the Microcontamination Research Laboratory, and the Center
for Particulate Control in Process Equipment at Clarkson University for
15 years. He also was a visiting Scientist and a consultant at The Lawrence
Livermore National Laboratory.
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